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Carl Zeiss SMS GmbH, Jena, Germany✝︎

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Name

Carl Zeiss SMS GmbH

Register

Ut
District Court of Jena HRB 208988
Lei
529900AWQB8PVBQJG290

Address

Jena, Germany

Corporate purpose

Entwicklung, Herstellung und Vertrieb von lichtoptischen und korpuskularstrahlbasierten Inspektions-, Mess-, Kontroll- und Produktionssystemen, Modulen und Komponenten für die Halbleiterindustrie einschließlich damit jeweils zusammenhängender Dienstleistungen.

Financials

History

Marketing & Tech

Merger & Acquisition & Control

Network

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Publications

13 Nov 2018
EU funding: Synaptic Dysfunction in Neuropsychiatric Disorders
31 Jul 2015 via Carl Zeiss AG, also 08/07/2015, 14/07/2014, 02/05/2014, 20/06/2013, 12/06/2013, 23/07/2012, 25/04/2012, 19/08/2011, 19/08/2011, 01/06/2010, 01/06/2010, 10/11/2009, 13/08/2009, 18/08/2008, 17/07/2008
Shareholder: Carl Zeiss AG
18 May 2015
Ter­mi­na­tion · Merger: Carl Zeiss SMT GmbH
4 May 2015
Merger: Carl Zeiss SMT GmbH
8 Jan 2015
Patent: Determination of contamination in a vacuum chamber
27 Oct 2014
No longer Managing Director: Oliver Kienzle · Officer (1)
17 Sept 2014
Officer (1) · No longer Officer (1)
17 Jul 2014
Patent: Methods for unloading photolithography masks and device for this
16 Jun 2014
Patent: Method and Device for Determining a Reference Point of an Orientation Marking on a Substrate of a Photolithographic Mask in an Automated Manner
13 Feb 2014
Patent: Method for Ascertaining Distortion Properties of an Optical System in a Measurement System for Microlithography
29 Oct 2013
Control: Carl Zeiss SMT GmbH · Control: Carl Zeiss SMT GmbH
31 Jul 2013
No longer Officer (1)
22 May 2013
Patent: Method and Apparatus for Determining the Relative Overlay Shift of Stacked Layers
17 Apr 2013
Patent: Methods and Systems for Removing a Material From a Sample
17 Jan 2013
Patent: Method and device for determining the position of structures on a mask for microlithography
9 Jan 2013
Patent: Method for Electron Beam Induced Etching of Layers Implanted with Gallium
Year 2012 in Epobase
7 European patent filings: Particle-Optical System …
20 Jun 2012
No longer Officer (1)
5 Apr 2012
Managing Director: Roberto Deger · No longer Officer: Roberto Deger
29 Feb 2012
Officer (1) · No longer Officer (1)
Year 2011 in Epobase
9 European patent filings: Method for Characterizing a Structure on a Mask and Device for Carrying OUT Said Method …
8 Jun 2011
Merger: SMS Internationale Beteiligungsgesellschaft mbH
30 May 2011 via SMS Internationale Beteiligungsgesellschaft mbH
Merger: SMS Internationale Beteiligungsgesellschaft mbH
26 Jan 2011
Officer (1) · No longer Officer (1)
Year 2010 in Epobase
4 European patent filings: Reflective X-RAY Microscope for Examining Objects with Wavelengths of = 100NM in Reflection …
29 Apr 2010 via NaWoTec GmbH
Merger: NaWoTec GmbH
29 Apr 2010
Officer (1) · Merger: NaWoTec GmbH
31 Mar 2010
No longer Officer (1)
31 Mar 2010
Merger: Carl Zeiss SMS Beteiligungsgesellschaft mbH
23 Mar 2010 via Carl Zeiss SMS Beteiligungsgesellschaft mbH
Merger: Carl Zeiss SMS Beteiligungsgesellschaft mbH
Year 2009 in Epobase
11 European patent filings: Method and Device for Measuring the Relative Local Position Error of ONE of the Sections of an Object That IS Exposed Section by Section …
10 Jun 2009
No longer Officer (2) · Officer (2)
25 Feb 2009
No longer Managing Director (1) · Address
4 Feb 2009
Control: Carl Zeiss SMT AG · Control: Carl Zeiss SMT AG
27 Nov 2008
Patent: Method and apparatus for determining the relative overlay displacement of superimposed layers
Year 2008 in Epobase
9 European patent filings: Method for Repairing Phase Shift Masks …
17 Sept 2008
Officer (4) · Managing Director (2)
20 Aug 2008
Share­holder agreement
27 Feb 2008
Patent: Material processing system and material processing processes
31 Jan 2008
Patent: Kohärenzminderer für ein zugeführtes kohärentes Strahlenbündel und Verfahren zur Verringerung der Kohärenz eines kohärenten Strahlenbündels
Year 2007 in Epobase
9 European patent filings: Apparatus for Measurement of Structures on Photolithographic Masks …
24 Oct 2007
Managing Director: Oliver Kienzle
25 Jun 2007
Officer (1) · No longer Officer (1)
15 Jun 2007
Officer (1) · No longer Officer (1)
1 Mar 2007
Public funding (€641,852): Evaluierung der Nano-Imprint-Technologie für sub 35nm IC (FANTASTIC) - Teilvorhaben: Inspektions- und Reparaturtechnologie für Nano-Imprint-Templates
Year 2006 in Epobase
11 European patent filings: Low Stress Optical Mount …
31 Aug 2006
Patent: Mask inspection procedures as part of mask design and mask production
28 Aug 2006
Officer (1)
24 May 2006
No longer Officer (2) · Officer (1)
4 May 2006 via Carl Zeiss Jena Grundstücks GmbH & Co. KG
Limited Partner: Carl Zeiss Jena Grundstücks GmbH & Co. KG
18 Apr 2006
Reg­is­tra­tion · Officer (4) · Managing Director (1) · Capital: €2,500,000 · Seat: Jena · Legal form: GmbH · Name: Carl Zeiss SMS GmbH · Corporate Purpose
Year 2005 in Epobase
6 European patent filings: Automatic Focussing Device for an Optical Appliance …

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