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EU funding (€24.9M): Integration of processes and moDules for the 2 nm node meeting Power Performance Area and Cost requirements Hor 21 May 2021 EU Research and Innovation programme "Horizon"

Overview

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Integration of processes and moDules for the 2 nm node meeting Power Performance Area and Cost requirements

In the ID2PPAC project the technology solutions for the 2nm node identified in the preceding project IT2 will be consolidated and integrated with the objective to demonstrate that Performance Power Area and Cost (PPAC) requirements for this generation of leading edge logic technology can be achieved. To continue the Moore’s law trajectory to the 2nm node, while meeting PPAC requirements, the combination of further advancements in EUV lithography & masks, 3D device structures, materials and metrology is required. The strength of the project pivots on the focused engagement of leading expert partners in these key interlocking areas and a shared pilot line. The ID2PPAC project, is expected to enable IC-fabs to do EUV-based, single-print, High Volume Manufacturing for the 2nm node by 2025. This technology evolution is driven by the growing demand for compute power which increases more than exponentially with time and has made the world migrate from 1 billion interconnected devices in the “PC era” to 10 billion in the “Mobile + cloud era” to the future “Intelligence era” in which there will be over 100 billion intelligent connected devices. To enable this growth, the semiconductor industry is continuously pursuing technology innovations to realize this progress as has been predicted by Moore’s Law and will continue to do so. The project will also help to expand Europe's technological capacity to act in this field, which is crucial for digitization, (edge) AI and for solving national, European and global societal challenges and will strengthen the consortium of leading European companies and institutes active in this sector.


Funded Companies:

Company name Funding amount
Advanced Mask Technology Center GmbH & Co. KG €279,750
Applied Materials Israel Ltd. €553,750
Asml Netherlands B.V. €2,713,200
Cameca SAS €140,000
Carl Zeiss SMS Ltd. €972,740
Carl Zeiss SMT GmbH €4,094,071
Crytur Spol s.r.o. €244,210
EV Group E. Thallner GmbH €294,285
FEI Electron Optics B.V. €1,124,000
Fraunhofer Gesellschaft ZUR Forderung DER Angewandten Forschung e. V. €282,038
Fundacio Institut de Ciencies Fotoniques €66,325
Fyzikalni Ustav AV CR, VVI €65,538
Icos Vision Systems N.V. €368,750
Institut Fuer Mikroelektronik Stuttgart €890,498
Interuniversitair Micro-Electronica Centrum €5,092,325
JSR Micro N.V. €113,281
KLA-Tencor Corporation (Israel) €1,205,000
LAM Research International B.V. €734,375
LAM Research SAS €286,756
Mellanox Technologies Ltd. - MLNX €1,300,000
Nederlandse Organisatie Voor Toegepast Natuurwetenschappelijk Onderzoek TNO €651,951
Nova Ltd. €1,260,000
Optix FAB GmbH €171,875
Plansee SE €592,207
PVA Tepla Analytical Systems GmbH €600,000
Recif Technologies €326,986
VDL ETG Technology & Development B.V. €431,407

Source: https://cordis.europa.eu/project/id/101007254

The filing refers to a past date, and does not necessarily reflect the current state.