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Carl Zeiss SMT GmbH, Oberkochen, Germany

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Name

Carl Zeiss SMT GmbH
Carl Zeiss SMT AG

Register

Ut
District Court of Ulm HRB 725667
Ut
District Court of Ulm HRB 501473
Lei
529900DAXFMKONEX8260

Address

Rudolf-Eber-Str. 2, 73447 Oberkochen, Germany

Corporate purpose

The development, manufacture, working and processing and distribution of optical, electron-optical, electronic and fine mechanical products, instruments and other equipment for use in the semiconductor industry, including the provision of related services.

Financials

History

Legal Representatives

Marketing & Tech

Merger & Acquisition & Control

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DATA SERVICES

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Publications

8 May 2024
Wordmark: “INTUITIVE 3D“
8 May 2024
Wordmark: “EXPLORE 3D“
Year 2024 in Dp
131 patent filings: EUV-Kollektor zur Verwendung in einer EUV-Projektionsbelichtungsvorrichtung …
26 Apr 2024
Officer: Christoph Hensche
Year 2024 in Epobase
4 European patent filings: Component for a Projection Exposure Apparatus …
Year 2023 in Dp
256 patent filings: Cooling device for a lithography machine, lithography equipment and method for damping a pressure fluctuation of a liquid in a liquid line of a cooling device of a lithography …
Year 2023 in Epobase
34 European patent filings: Electro-Optical Circuit Board for Contacting Photonic Integrated Circuits …
10 Aug 2023
List of board members
8 Aug 2023
Aufsichtsrat
21 Jul 2023 via Carl Zeiss AG, also 19/07/2023, 19/07/2023, 23/06/2022, 22/06/2022, 22/06/2022, 01/06/2021, 05/05/2021, 13/07/2020, 06/07/2020, 02/08/2019, 02/08/2019, 02/08/2019, 16/08/2018, 16/08/2018, 07/06/2017, 01/06/2017, 03/08/2016, 03/08/2016, 31/07/2015, 08/07/2015, 14/07/2014, 02/05/2014, 20/06/2013, 12/06/2013, 23/07/2012, 25/04/2012, 19/08/2011, 19/08/2011, 01/06/2010, 01/06/2010, 10/11/2009, 13/08/2009, 18/08/2008, 17/07/2008
Shareholder: Carl Zeiss AG
4 Jul 2023
Aufsichtsrat
3 Jul 2023
List of board members
1 May 2023 in Fk
Public funding (€472,400): Module development for the 14 Angstrom lithography in chip production - 14AMI -
29 Mar 2023
Aufsichtsrat
Year 2022 in Dp
242 patent filings: Endpoint determination by induced desorption of gases and analysis of recover …
Year 2022 in Epobase
50 European patent filings: Projection Exposure Method and Projection Exposure System for Microlithography …
9 Sept 2022
No longer Managing Director: Andreas Dorsel
1 Aug 2022
Officer: Christoph Hensche
7 Jul 2022 in Fk
Public funding (€376.7M): Future EUV Lithography Optics for the Integrated Circuits of Tomorrow - EUV2027
5 May 2022
Wordmark: “xVerse“
10 Mar 2022
Wordmark: “xVerse“
24 Feb 2022
Officer: Jens Werner
24 Feb 2022
List of board members
20 Jan 2022
Managing Director: Andreas Peter Pecher · No longer Managing Director: Markus Weber
Year 2021 in Dp
180 patent filings: Component connection, lithography system and method for designing a component connection …
Year 2021 in Epobase
65 European patent filings: Mirror System …
1 Sept 2021
Wordmark: “ArTeMiS“
1 Jul 2021 in Fk
Public funding (€550,682): Manufacturing Technologies and Processes for High-Performance 2nm Electronics - ID2PPAC -
1 Jul 2021 in Fk
Public funding (€2,936,113): Manufacturing Technologies and Processes for High-Performance 2nm Electronics - ID2PPAC -
21 May 2021 in Hor
EU funding (€4,039,071): Integration of processes and moDules for the 2 nm node meeting Power Performance Area and Cost requirements
14 Apr 2021
Wordmark: “CIRGEN“
Year 2020 in Dp
174 patent filings: Optical system for a lithography system …
Year 2020 in Epobase
61 European patent filings: Optical Elements Comprising Magnetostrictive Material …
25 Sept 2020
Wordmark: “CIRGEN“
23 Jun 2020
Wordmark: “MAVRIX“
1 Jun 2020 in Hor
EU funding (€2,782,398): IC Technology for the 2nm Node
1 Jun 2020 in Fk
Public funding (€1,933,003): Technologies for the latest 2nm microelectronics - IT2 -
5 Feb 2020
Wordmark: “AIMS“
Year 2019 in Dp
177 patent filings: Diffractive optical element and processes for its production …
Year 2019 in Epobase
101 European patent filings: Device and Method for Characterizing the Surface Shape of a Test Object …
12 Dec 2019
List of board members
23 Oct 2019
Managing Director: Markus Weber
17 Oct 2019
Member of the Executive Board: Markus Weber · No longer Managing Director: Karl Lamprecht
1 Oct 2019 in Fk
Public funding (€5,200,962): Pilot line for the next generation of highly integrated microelectronics - PIN3S -, sub-projects: Pilot integration of photo and electron optical systems for the 3nm …
20 May 2019 in Hor
EU funding (€5,913,176): Pilot Integration of 3nm Semiconducter technology
Year 2018 in Dp
141 patent filings: assembly, especially in a microlithographic projection system …
Year 2018 in Epobase
86 European patent filings: Mirrors for EUV Lithography …
6 Nov 2018
Wordmark: “RepScan“
1 Oct 2018 in Fk
Public funding (€3,999,177): Technologies for the next generation of highly integrated microelectronics - TAPES3 -, sub-projects: EUV projection lens for 3nm resolution
22 Aug 2018
Managing Director: Torsten Reitze · No longer Managing Director: Axel Jaeger
28 Jun 2018 in Hor
EU funding (€4,156,250): Technology Advances for Pilotline of Enhanced Semiconductors for 3nm
13 Jun 2018
List of board members
17 Jan 2018
List of board members
Year 2017 in Dp
90 patent filings: Projection exposure system with particle trap …
Year 2017 in Epobase
85 European patent filings: Trajectory Fitting …
27 Jun 2017
Share­holder agreement
22 Jun 2017
Original document: “Gesellschaftsvertrag / Satzung / Statut“
15 May 2017
Control: Carl Zeiss SMT Holding GmbH & Co. KG · Control: Carl Zeiss SMT Holding GmbH & Co. KG · No longer Control: Carl Zeiss AG · No longer Control: Carl Zeiss AG
15 May 2017
Control: Carl Zeiss SMT Holding GmbH & Co. KG · Control: Carl Zeiss SMT Holding GmbH & Co. KG · No longer Control: Carl Zeiss AG · No longer Control: Carl Zeiss AG
1 Apr 2017 in Hor
EU funding (€5,596,579): Technology Advances and Key Enablers for Module Integration for 5 nm
6 Mar 2017
Original document: “Unternehmensvertrag / Umwandlungsvertrag / sonstiger Vertrag“
14 Feb 2017
No longer Managing Director: Hermann Gerlinger · Share­holder agreement
16 Jan 2017 in Fk
Public funding (€52.4M): EUV Optics Systems for sub-10nm Resolution - Construction of a first production line
Year 2016 in Epobase
82 European patent filings: Imaging Optical Unit for Imaging an Object Field in an Image Field, and Projection Illumination System Having Such an Imaging Optical Unit …
13 Dec 2016
Original document: “Liste der Gesellschafter“
Year 2016 in Dp
62 patent filings: Probe system and method for recording a probe of a scanning probe microscope …
7 Dec 2016
Managing Director: Karl Lamprecht
6 Oct 2016
List of board members
1 Oct 2016 in Fts
EU funding (€241,964): 722149 - Elena - LOW Energy Electron Driven Chemistry for the Advantage of Emerging Nano-Fabrication Methods
23 Sept 2016 via Centre National de la Recherche Scientifique
EU funding (€249,216): Low energy ELEctron driven chemistry for the advantage of emerging NAno-fabrication methods
2 Aug 2016
List of board members
1 Apr 2016 in Hor
EU funding (€3,600,000): Technology Advances and Key Enablers for 5 nm
1 Apr 2016 in Fk
Public funding (€3,598,844): Manufacturing processes of integrated circuits with previously unmatched structural sizes of up to 5 nm - TAKE5 -, sub-projects: EUV lighting optics for 5 nm projection …
8 Mar 2016
List of board members
3 Feb 2016
No longer Officer (1)
Year 2015 in Dp
59 patent filings: Projection exposure system with soldered seal …
Year 2015 in Epobase
104 European patent filings: Arrangement for Reducing Contamination in a Microlithographic Projection Exposure Apparatus …
1 Oct 2015 in Fk
Public funding (€757,572): Robust multi-sensor technology for condition monitoring in Industrial 4.0 applications - RoMulus - sub-projects: MEMS modelling and Industry 4.0 applications in optics
18 May 2015 via Carl Zeiss SMS GmbH, also 04/05/2015
Merger: Carl Zeiss SMS GmbH
12 May 2015 via Carl Zeiss Laser Optics GmbH
Merger: Carl Zeiss Laser Optics GmbH
12 May 2015
Merger: Carl Zeiss Laser Optics GmbH
12 May 2015
Merger: Carl Zeiss SMS GmbH
12 May 2015
Merger: Carl Zeiss SMS GmbH
1 Apr 2015 in Hor
EU funding (€2,357,991): Seven Nanometer Technology
1 Apr 2015 in Fk
Public funding (€2,273,731): Seven Nanometer Technology - SeNaTe - sub-projects: projection lens with seven nanometer resolution
1 Apr 2015 in Fk
Public funding (€43,162): Seven Nanometer Technology - SeNaTe -, Sub-Projects: Repair and local repair of defects on EUV masks by radiation-induced surface processes
28 Jan 2015
List of board members
Year 2014 in Dp
43 patent filings: Lighting optics for a metrology system and metrology system with such lighting optics …
Year 2014 in Epobase
73 European patent filings: Method for Measuring a Spherical-Astigmatic Optical Area …
1 Oct 2014 in Fk
Public funding: European 450mm Lithography and Metrology Development for Advanced Patterning - E450LMDAP - subprojects: Image Placement Optimizer, high NA EUV Projection System and hyper NA EUV …
16 Sept 2014
Wordmark: “Predict“
11 Aug 2014
Officer (1) · No longer Officer (1)
25 Jun 2014
Wordmark: “FAVOR“
Year 2013 in Epobase
106 European patent filings: EUV Mirror and Optical System Comprising EUV Mirror …
Year 2013 in Dp
49 patent filings: Microscope and methods for characterizing structures on an object …
19 Nov 2013
Control: Carl Zeiss AG · Control: Carl Zeiss AG
19 Nov 2013
List of board members
29 Oct 2013 via Carl Zeiss SMS GmbH
Control, Control: Carl Zeiss SMS GmbH
25 Sept 2013 via Carl Zeiss Laser Optics GmbH
Control, Control: Carl Zeiss Laser Optics GmbH
9 Jul 2013
No longer Officer (1)
22 May 2013
List of board members
27 Feb 2013
No longer Officer (1)
Year 2012 in Dp
63 patent filings: Process for the production of a reflective optical element for EUV lithography …
Year 2012 in Epobase
91 European patent filings: Optical System for a Microlithographic Projection Exposure Apparatus and Microlithographic Exposure Method …
7 Aug 2012
Officer: Andreas Zeiler · No longer Officer (1)
1 Jul 2012 in Fk
Public funding (€124,260): 'Schematic-based design of MEMS for optics and robotics applications' (MEMS2015) subproject: Creation of requirements and testing of integrated MEMS - ASIC design …
19 Jun 2012
List of board members
1 Jun 2012 in Fk
Public funding (€4,561,520): EUV projection optics for 14nm resolution (ETIK) - Sub-projects: EUV lighting system and mirror free-form surface technology
21 May 2012
Managing Director: Axel Jaeger
8 May 2012
Managing Director: Axel Jaeger
23 Apr 2012
Managing Director: Axel Jaeger · No longer Managing Director (1)
12 Mar 2012
List of board members
21 Feb 2012
Officer (1) · No longer Officer (1)
8 Feb 2012
Officer (1) · No longer Officer (1)
Year 2011 in Dp
41 patent filings: Metrology system …
Year 2011 in Epobase
90 European patent filings: Projection System with a Polarization-Modulating Element Having a Variable Thickness Profile …
19 May 2011
Control: Carl Zeiss AG · Control: Carl Zeiss AG
5 May 2011
Control: Carl Zeiss AG · Control: Carl Zeiss AG
8 Feb 2011
List of board members
25 Jan 2011
No longer Officer (2) · Officer (1)
11 Jan 2011
No longer Officer (2) · Officer (1)
Year 2010 in Dp
50 patent filings: Method for determining a diffraction grating …
Year 2010 in Epobase
70 European patent filings: Illumination System of a Microlithographic Projection Exposure Apparatus …
Year 2010 in Epobase
12 European patent filings: Illumination Lens for an EUV Projection Microlithography, Projection Exposure Apparatus and Method for Manufacturing Microstructured Component …
28 Oct 2010
Wordmark: “RegC“
20 Oct 2010
Officer (5) · Managing Director (3) · Change of legal form: Aktiengesellschaft Carl Zeiss SMT AG · Address · Capital: €50M · Share­holder agreement · Proxy · Corporate Purpose
20 Oct 2010 as Carl Zeiss SMT AG
Change of legal form: Carl Zeiss SMT GmbH
6 Oct 2010 via Carl Zeiss NTS GmbH
No longer Control, No longer Control: Carl Zeiss NTS GmbH
11 Feb 2010 as Carl Zeiss SMT AG
No longer Member of the Executive Board (1)
29 Jan 2010
No longer Member of the Executive Board (1)
Year 2009 in Epobase
63 European patent filings: Catadioptric Projection Objective …
Year 2009 in Epobase
35 European patent filings: Catadioptric Projection Objective …
Year 2009 in Dp
32 patent filings: Cleaning module, EUV lithography device and method for cleaning it …
10 Nov 2009 as Carl Zeiss SMT AG
List of board members
12 May 2009 as Carl Zeiss SMT AG
Officer (1) · No longer Officer (1) · Address
1 May 2009 in Fk
Public funding (€8,686,016): EUV Lithograph for the 22nm Node - Subproject: EUV Lithography Optics
1 May 2009 in Fk
Public funding (€653,597): EUV lithography for the 22nm node - subproject: EUV mask repair and local removal of foreign materials due to radiation-induced surface processes
30 Apr 2009
Officer (1) · No longer Officer (1) · Address
Year 2008 in Dp
32 patent filings: Method and device for the control of a variety of actuators of a projection imaging system for microlithography …
Year 2008 in Epobase
73 European patent filings: Optical Device Comprising a Spring Device with a Range of Constant Spring Force …
Year 2008 in Epobase
64 European patent filings: Optical Device Comprising a Spring Device with a Range of Constant Spring Force …
25 Nov 2008 as Carl Zeiss SMT AG
List of board members
28 Oct 2008 as Carl Zeiss SMT AG
No longer Officer: Karl Lamprecht
15 Jul 2008 as Carl Zeiss SMT AG
Company statute · Corporate Purpose
4 Jul 2008
Company statute · Corporate Purpose
28 Apr 2008
Officer (1)
4 Mar 2008
Corporate Purpose
Year 2007 in Epobase
88 European patent filings: Method for Adjusting an Optical Imaging Property of a Projection Objective of a Microlithographic Projection Exposure Apparatus …
Year 2007 in Epobase
81 European patent filings: Method for Adjusting an Optical Imaging Property of a Projection Objective of a Microlithographic Projection Exposure Apparatus …
Year 2007 in Dp
12 patent filings: Method and device for layer optimization by means of radicals …
9 Oct 2007 as Carl Zeiss SMT AG
Company statute
25 Sept 2007
Company statute
24 Apr 2007 as Carl Zeiss SMT AG
List of board members
13 Mar 2007 as Carl Zeiss SMT AG
No longer Officer (3) · Member of the Executive Board (3) · Officer (1)
13 Mar 2007 as Carl Zeiss SMT AG
List of board members
27 Feb 2007
Member of the Executive Board (4) · No longer Officer (3) · Officer (1)
16 Jan 2007 as Carl Zeiss SMT AG
No longer Member of the Executive Board (1)
Year 2006 in Epobase
112 European patent filings: Illumination System with Multiple Light Sources …
Year 2006 in Epobase
97 European patent filings: Illumination System with Multiple Light Sources …
11 Dec 2006
Wordmark: “Enabling the Nano Age World“
Year 2006 in Dp
9 patent filings: Imaging system, especially for a microlithographic projection exposure system …
18 Oct 2006 via Carl Zeiss Grundstücks GmbH & Co. KG
No longer Limited Partner: Carl Zeiss Oberkochen Grundstücks GmbH & Co.KG
3 Jul 2006
Officer (2)
1 Jul 2006 in Fk
Public funding (€2,972,602): '193nm lithography for the production of 32nm structures' within the overall measure 'Lithography for the 45nm and 32nm knots'
26 Jun 2006 as Carl Zeiss SMT AG
Reg­is­tra­tion · Officer (6) · Member of the Executive Board (2) · Capital: €50M · Seat: Oberkochen, Germany · Legal form: AG · Name: Carl Zeiss SMT AG · Corporate Purpose
1 Apr 2006 in Fk
Public funding (€239,195): Fluoridic laser components for the UV-X spectral range (FLUX) - Sub-projects: Improved and new processes for the coating of VUV laser components
Year 2005 in Epobase
89 European patent filings: Projection Optical System …
Year 2005 in Epobase
83 European patent filings: Projection Optical System …
Year 2005 in Dp
16 patent filings: Projection lens for a microlithographic projection exposure device …
29 Sept 2005 as Carl Zeiss SMT AG
Patent: Projection lens of a microlithographic projection exposure system
1 Jul 2005 in Fk
Public funding (€6,321,920): 'EUV lithography optics' within the overall measure 'Lithography for the 45nm and 32nm knots'
24 Feb 2005
Wordmark: “NaWoTec“
Year 2004 in Dp
11 patent filings: Method for determining the imaging quality of an optical imaging system …
Year 2003 in Dp
14 patent filings: Optical arrangement for the homogenization of at least partially coherent light field …
Year 2002 in Dp
5 patent filings: Efficient dark current subtraction in an image sensor …
25 Apr 2002 as Carl Zeiss SMT AG
Patent: Projection exposure system
Year 2001 in Dp
5 patent filings: Project exposure system of microlithography …

Mentions

17 Nov 2023
Direct parent: Carl Zeiss AG
17 Nov 2023
Ultimate parent: Carl Zeiss AG

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